Combining TOF-SIMS with XPS to quantify organic surface coverages

Kenens, ConnyConnyKenensConard, ThierryThierryConardHellemans, L.L.HellemansBertrand, P.P.BertrandVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4467Combining TOF-SIMS with XPS to quantify organic surface coveragesProceedings paper