Kraus, HaraldHaraldKrausVermeyen, KennethKennethVermeyenSnow, JimJimSnowFyen, WimWimFyenMertens, PaulPaulMertensKovacs, FredericFredericKovacs2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7756Cleaning of metal gate stacks for the sub 90nm technology nodeMeeting abstract