Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devices

Porret, ClémentClémentPorretRengo, GianlucaGianlucaRengoAyyad, MustafaMustafaAyyadHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelLanger, RobertRobertLangerLoo, RogerRogerLoo2023-07-072023-02-202023-07-0720230021-4922WOS:000923037200001https://imec-publications.be/handle/20.500.12860/41116Low temperature selective growth of Ga-doped and Ga-B co-doped germanium source/drain for PMOS devicesJournal article10.35848/1347-4065/acb1b9WOS:000923037200001EPITAXYGEGA(C2H5)3GA(CH3)3