Tuned electrostatic probe for RF plasma diagnostics

Cirino, GiuseppeGiuseppeCirinoCastro, RaulRaulCastroPisani, MarceloMarceloPisaniVerdonck, PatrickPatrickVerdonck2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22151Tuned electrostatic probe for RF plasma diagnosticsProceedings paperhttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6676142