De Moor, PietPietDe MoorSedky, SherifSherifSedkySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanVan Hoof, ChrisChrisVan Hoof2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3365Uncooled IR bolometers using surface micromachined Poly SiGeProceedings paper