Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

Franco, JacopoJacopoFrancoArimura, HiroakiHiroakiArimurade Marneffe, Jean-FrancoisJean-Francoisde MarneffeBrus, StephanStephanBrusRitzenthaler, RomainRomainRitzenthalerCroes, KristofKristofCroesKaczer, BenBenKaczerHoriguchi, NaotoNaotoHoriguchi2023-12-152023-10-172023-12-1520230018-9383WOS:001078339700001https://imec-publications.be/handle/20.500.12860/42793Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack SolutionsJournal article10.1109/TED.2023.3314001WOS:001078339700001