Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD

Romo Negreira, AinhoaAinhoaRomo Negreira2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14388Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVDMeeting abstract