Rip, JensJensRipCuypers, DanielDanielCuypersArnauts, SophiaSophiaArnautsHolsteyns, FrankFrankHolsteynsvan Dorp, DennisDennisvan DorpDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/24432Etching of III-V materials determined by ICP-MS with sub-nanometer precisionJournal articlehttp://jss.ecsdl.org/content/3/1/N3064.abstract