A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Van Hoornick, NausikaaNausikaaVan HoornickVan den Broeck, KristelKristelVan den BroeckVan Hoeymissen, JanJanVan HoeymissenHeyns, MarcMarcHeynsRiedel, W.W.RiedelBraun, C.C.Braun2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9760A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fabProceedings paper