Solid phase epitaxy of amorphous Ge films deposited by PECVD

Ma, QuanbaoQuanbaoMaLieten, RubenRubenLietenDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17540Solid phase epitaxy of amorphous Ge films deposited by PECVDMeeting abstract