Photon induced low temperature etching of copper and/or formation of copper nanowires

Dictus, DriesDriesDictusShamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivBoullart, WernerWernerBoullartBaklanov, MichailMichailBaklanovDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckierVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13664Photon induced low temperature etching of copper and/or formation of copper nanowiresOral presentation