Athermal silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides

Teng, JieJieTengDumon, PieterPieterDumonBogaerts, WimWimBogaertsZhang, HongboHongboZhangJian, XigaoXigaoJianHan, XiuyouXiuyouHanZhao, MingshanMingshanZhaoMorthier, GeertGeertMorthierBaets, RoelRoelBaets2021-10-182021-10-182009-081094-4087https://imec-publications.be/handle/20.500.12860/16296Athermal silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguidesJournal article