Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

Marsik, PremyslPremyslMarsikUrbanowicz, AdamAdamUrbanowiczVinokur, KlaraKlaraVinokurCohen, YoelYoelCohenBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14126Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometryProceedings paper