Towards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structures

Mody, JayJayModyEyben, PierrePierreEybenAugendre, EmmanuelEmmanuelAugendreRichard, OlivierOlivierRichardArstila, KaiKaiArstilaVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12584Towards extending the capabilities of Scanning Spreading Resistance Microscopy for FinFET-based structuresOral presentation