Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtD'Haen, JanJanD'HaenDouheret, OlivierOlivierDouheretDe Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardWitters, ThomasThomasWittersBender, HugoHugoBenderRichard, OlivierOlivierRichardHeyns, MarcMarcHeynsD'Olieslaeger, MarcMarcD'OlieslaegerVan Bael, MarliesMarliesVan BaelMullens, J.J.Mullens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12251Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric filmsJournal article