Holsteyns, FrankFrankHolsteynsCarbonell, LaureLaureCarbonellVos, IngridIngridVosVrancken, EviEviVranckenTokei, ZsoltZsoltTokeiMertens, PaulPaulMertens2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6401Defect inspection of Cu metallizationOral presentation