Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si

Takakura, K.K.TakakuraOhyama, H.H.OhyamaYoshida, T.T.YoshidaMurakawa, H.H.MurakawaRafi, Joan MarcJoan MarcRafiJob, R.R.JobUlyashin, A.A.UlyashinSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8204Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ SiOral presentation