Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

Uedono, AkiraAkiraUedonoVerdonck, PatrickPatrickVerdonckDelabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsWitters, ThomasThomasWittersConard, ThierryThierryConardBaklanov, MikhaïlMikhaïlBaklanovVan Elshocht, SvenSvenVan ElshochtOshima, NagayasuNagayasuOshimaSuzuki, RyoichiRyoichiSuzuki2021-10-212021-10-2120130021-4922https://imec-publications.be/handle/20.500.12860/23202Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beamsJournal articlehttp://dx.doi.org/10.7567/JJAP.52.106501