Vandervorst, WilfriedWilfriedVandervorstBrijs, BertBertBrijsBender, HugoHugoBenderConard, ThierryThierryConardPetry, JasmineJasminePetryRichard, OlivierOlivierRichardVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtCosnier, VincentVincentCosnierGreen, MartinMartinGreenChen, JerryJerryChen2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8321Physical characterization of ultrathin high k dielectricsProceedings paper