Hyperthermal oxygen interacting with silicon surfaces : adsorption, implantation, and damage creation

Neyts, ErikErikNeytsKhalilov, UmedjonUmedjonKhalilovPourtois, GeoffreyGeoffreyPourtoisvan Duin, AdriAdrivan Duin2021-10-192021-10-1920111932-7447https://imec-publications.be/handle/20.500.12860/19477Hyperthermal oxygen interacting with silicon surfaces : adsorption, implantation, and damage creationJournal article