Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling contrast imaging

Schulze, AndreasAndreasSchulzeHan, HanHanHanStrykos, LiborLiborStrykosVystavel, ThomasThomasVystavelPorret, ClémentClémentPorretLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31748Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling contrast imagingMeeting abstracthttp://ma.ecsdl.org/content/MA2018-02/31/1069.abstract