Wang, GangGangWangLeys, MaartenMaartenLeysNguyen, DuyDuyNguyenLoo, RogerRogerLooBrammertz, GuyGuyBrammertzRichard, OlivierOlivierRichardBender, HugoHugoBenderDekoster, JohanJohanDekosterMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsCaymax, MattyMattyCaymax2021-10-192021-10-1920110022-0248https://imec-publications.be/handle/20.500.12860/20129Growth of high quality InP layers in STI trenches on miscut Si (001) substratesJournal article