Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flash

Breuil, LaurentLaurentBreuilBlomme, PieterPieterBlommeTan, Chi LimChi LimTanLisoni, JuditJuditLisoniSouriau, LaurentLaurentSouriauZahid, MohammedMohammedZahidRichard, OlivierOlivierRichardBender, HugoHugoBenderVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23582Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flashProceedings paper