Influence of 0-level packaging on the microwave performance of RF-MEMS devices

Jourdain, AnneAnneJourdainBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5384Influence of 0-level packaging on the microwave performance of RF-MEMS devicesProceedings paper