Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Zhang, CanCanZhangFeng, YanYanFengBayer, BernhardBernhardBayerBlume, RaoulRaoulBlumevan der Veen, MarleenMarleenvan der VeenXie, RongsiRongsiXieZhong, GuofangGuofangZhongChen, BinganBinganChenKnop-Gericke, AxelAxelKnop-GerickeSchlögl, RobertRobertSchlöglCapraro, BernardBernardCapraroHofmann, StephanStephanHofmannRobertson, johnjohnRobertson2021-10-202021-10-2020120021-8979https://imec-publications.be/handle/20.500.12860/21911Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabricationJournal article