Line width dependent mobility in high-k – a comparative performance study between FUSI and TiN

Pantisano, LuigiLuigiPantisanoTrojman, LionelLionelTrojmanSeveri, SimoneSimoneSeveriSan Andres Serrano, EnriqueEnriqueSan Andres SerranoKerner, ChristophChristophKernerVeloso, AnabelaAnabelaVelosoFerain, IsabelleIsabelleFerainHoffmann, Thomas Y.Thomas Y.HoffmannGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12669Line width dependent mobility in high-k – a comparative performance study between FUSI and TiNProceedings paper