Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

Li, ZilanZilanLiSchram, TomTomSchramWitters, ThomasThomasWittersTseng, JoshuaJoshuaTsengDe Gendt, StefanStefanDe GendtDe Meyer, KristinKristinDe Meyer2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17491Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approachJournal article