Evaluating the risks and benefits of 3-D technology

Marchal, PolPolMarchalVan Bavel, MiekeMiekeVan Bavel2021-10-182021-10-182009-080163-3767https://imec-publications.be/handle/20.500.12860/15821Evaluating the risks and benefits of 3-D technologyJournal articlehttp://www.semiconductor.net/article/327156-Evaluating_the_Risks_and_Benefits_of_3_D_Technology.php