Bogdanowicz, JanuszJanuszBogdanowiczNuytten, ThomasThomasNuyttenGawlik, AndrzejAndrzejGawlikSergeant, StefanieStefanieSergeantOniki, YusukeYusukeOnikiPuttarame Gowda, PallaviPallaviPuttarame GowdaMertens, HansHansMertensCharley, Anne-LaureAnne-LaureCharley2025-06-232024-02-112025-06-2320241530-6984WOS:001155522600001https://imec-publications.be/handle/20.500.12860/43534Taming the Distribution of Light in Gate-All-Around Semiconductor DevicesJournal article10.1021/acs.nanolett.3c04033WOS:001155522600001AMORPHOUS SIRAMANSTRESSGEMEDLINE:38231178