Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties

Porret, ClémentClémentPorretRengo, GianlucaGianlucaRengoHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelAyyad, MustafaMustafaAyyadMorris, RichardRichardMorrisVantomme, AndreAndreVantommeLoo, RogerRogerLoo2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37066Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical propertiesMeeting abstract10.1149/MA2021-01341096mtgabshttps://doi.org/10.1149/MA2021-01341096mtgabs