Machine learning based recursive partitioning for simplifying OPC model building complexity

Oak, ApoorvaApoorvaOakHwang, SoobinSoobinHwangChen, RuoxiaRuoxiaChenKang, ShinillShinillKangKim, Ryan Ryoung hanRyan Ryoung hanKim2022-06-162021-11-022022-06-1620210277-786XWOS:000672647800016https://imec-publications.be/handle/20.500.12860/37770Machine learning based recursive partitioning for simplifying OPC model building complexityProceedings paper10.1117/12.2584704978-1-5106-4062-7WOS:000672647800016