Bearda, TwanTwanBeardaVandermot, IefIefVandermotVan den Broeck, KristelKristelVan den BroeckVan Hoornick, NausikaaNausikaaVan HoornickVan Hoeymissen, JanJanVan HoeymissenMertens, PaulPaulMertens2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10072Metal contamination on silicon surfaces from solventsProceedings paper