High doping density/high electric field, stress and heterojunction effects on the characteristisc of CMOS compatible p-n junctions

Simoen, EddyEddySimoenEneman, GeertGeertEnemanBargallo Gonzalez, MireiaMireiaBargallo GonzalezKobayashi, DaisukeDaisukeKobayashiLuque Rodriguez, AbrahamAbrahamLuque RodriguezJimenez Tejada, J.-A.J.-A.Jimenez TejadaClaeys, CorCorClaeys2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19786High doping density/high electric field, stress and heterojunction effects on the characteristisc of CMOS compatible p-n junctionsJournal article