Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects

Iacopi, FrancescaFrancescaIacopiTravaly, YoussefYoussefTravalyStucchi, MicheleMicheleStucchiStruyf, HerbertHerbertStruyfPeeters, StefanStefanPeetersJonckheere, RikRikJonckheereLeunissen, PeterPeterLeunissenTokei, ZsoltZsoltTokeiSutcliffe, VictorVictorSutcliffeRichard, OlivierOlivierRichardVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-152021-10-152004-05https://imec-publications.be/handle/20.500.12860/9084Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnectsProceedings paper