Shite, HideoHideoShiteBradon, NeilNeilBradonNafus, KathleenKathleenNafusKitano, JunichiJunichiKitanoKosugi, HitoshiHitoshiKosugiHermans, JanJanHermansHendrickx, EricEricHendrickxFoubert, PhilippePhilippeFoubertGronheid, RoelRoelGronheidJehoul, ChristianeChristianeJehoulVan Den Heuvel, DieterDieterVan Den HeuvelGoethals, MiekeMiekeGoethalsCheng, ShauneeShauneeCheng2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17980EUV process sensitivities and optimizations for track processingProceedings paper