Thiam, ArameArameThiamWan, DannyDannyWanSouriau, LaurentLaurentSouriauBabaei Gavan, KhashayarKhashayarBabaei GavanRassoul, NouredineNouredineRassoulSwerts, JohanJohanSwertsCouet, SebastienSebastienCouetRaymenants, ElineElineRaymenantsJussot, JulienJulienJussotTrivkovic, DarkoDarkoTrivkovicErcken, MoniqueMoniqueErckenWilson, ChrisChrisWilsonRadu, IulianaIulianaRadu2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34116Patterning challenges for beyond 3nm logic devices: Example of an interconnected magnetic tunnel junctionProceedings paperhttps://doi.org/10.1117/12.2515086