Patterning options for N7 logic : Prospects and challenges for EUV

van Setten, EelcoEelcovan SettenWittebrood, FrisoFrisoWittebroodPsara, EleniEleniPsaravan Oorschot, DorotheDorothevan OorschotPhilipsen, VickyVickyPhilipsen2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26090Patterning options for N7 logic : Prospects and challenges for EUVProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2436945