Closed-loop modeling of silicon nanophotonics: from design to fabrication and back again

Bogaerts, WimWimBogaertsVanholme, LievenLievenVanholmeBradt, P.P.BradtBienstman, PeterPeterBienstman2021-10-172021-10-172008-06https://imec-publications.be/handle/20.500.12860/13408Closed-loop modeling of silicon nanophotonics: from design to fabrication and back againProceedings paper