Tavares, J.J.TavaresBender, HugoHugoBenderWu, Ming FangMing FangWuVantomme, AndreAndreVantommeLangouche, G.G.LangoucheLin, Chia-HuiChia-HuiLin2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/903HREM characterization of ion beam synthesized ternary silicides in (111) siliconProceedings paper