Modelling step height reduction based on pad-substrate interactions for different pads

Grillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisHeylen, NancyNancyHeylenDevriendt, KatiaKatiaDevriendtVrancken, EviEviVranckenHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2597Modelling step height reduction based on pad-substrate interactions for different padsOral presentation