Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching

Yanovich, S.S.YanovichBaklanov, MikhaïlMikhaïlBaklanovOrlov, S.S.OrlovGushchin, O.O.GushchinZaitsev, N.N.ZaitsevIgnatov, P.P.IgnatovYafarov, R.R.Yafarov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21877Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etchingMeeting abstract