Van Driessche, V.V.Van DriesscheGrozev, G.G.GrozevLucas, K.K.LucasVan Roey, FriedaFriedaVan RoeyTzviatkov, PlamenPlamenTzviatkov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6933100nm generation contact patterning by low temperature 193nm resist reflow processJournal article