Using Programmed defect vehicle to understand printability of defect/2D structures and characterize it through EUV process impact

Reddy, Bojja AdityaBojja AdityaReddyBaskaran, BalakumarBalakumarBaskaranSaib, MohamedMohamedSaibFranke, Joern-HolgerJoern-HolgerFrankeBeral, ChristopheChristopheBeralPak, MuratMuratPakHalder, SandipSandipHalderDusa, MirceaMirceaDusa2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300056https://imec-publications.be/handle/20.500.12860/45963Using Programmed defect vehicle to understand printability of defect/2D structures and characterize it through EUV process impactProceedings paper10.1117/12.3052510978-1-5106-8639-7WOS:001514426300056