Morschbacher, M.J.M.J.Morschbacherda Silva, D.L.D.L.da SilvaFichtner, P.F.P.P.F.P.FichtnerOliviero, E.E.OlivieroBehar, M.M.BeharZawislak, F.C.F.C.ZawislakHollander, B.B.HollanderLuysberg, M.M.LuysbergMantl, S.S.MantlLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9323Microstructure evolution effects of helium redistribution in as-implanted silicon and Si0.8Ge0.2/Si heterostructuresJournal article