Foubert, PhilippePhilippeFoubertNafus, KathleenKathleenNafusShite, HideoHideoShiteGoethals, MiekeMiekeGoethalsMatsunaga, KoichiKoichiMatsunagaHermans, JanJanHermansHendrickx, EricEricHendrickx2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20686Process evaluation and optimization for EUV manufacturingOral presentationhttps://www.sematech.org/10258