Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigation

Ghisi, AldoAldoGhisiKalicinski, StanislawStanislawKalicinskiMariani, StefanoStefanoMarianiDe Wolf, IngridIngridDe WolfCorigliano, AlbertoAlbertoCorigliano2021-10-172021-10-1720090960-1317https://imec-publications.be/handle/20.500.12860/15345Polysilicon MEMS accelerometers exposed to shocks: numerical-experimental investigationJournal article