Selective electroless deposition of cobalt using amino-terminated SAMs

Zyulkov, IvanIvanZyulkovArmini, SilviaSilviaArminiOpsomer, KarlKarlOpsomerDetavernier, ChristopheChristopheDetavernierDe Gendt, StefanStefanDe Gendt2021-10-282021-10-2820192050-7526https://imec-publications.be/handle/20.500.12860/34558Selective electroless deposition of cobalt using amino-terminated SAMsJournal articlehttps://pubs.rsc.org/en/content/articlelanding/2019/tc/c9tc00145j#!divAbstract