Correlation between predicted cause of SRAM failures and in-line defect data

Coppens, P.P.CoppensVanhorebeek, GuidoGuidoVanhorebeekDe Backer, E.E.De Backer2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5169Correlation between predicted cause of SRAM failures and in-line defect dataJournal article