High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices

Ryan, PaulPaulRyanWomington, MatthewMatthewWomingtonSun, JianwuJianwuSunHikavyy, AndriyAndriyHikavyyShimura, YosukeYosukeShimuraWitters, LiesbethLiesbethWittersTielens, HildeHildeTielensSchulze, AndreasAndreasSchulzeLoo, RogerRogerLoo2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25846High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devicesProceedings paperhttps://www.nist.gov/sites/default/files/documents/pml/div683/conference/FCMN_CD.pdf