Impact of line width roughness on the matching performances of next-generation devices

Gustin, CedricCedricGustinLeunissen, PeterPeterLeunissenMercha, AbdelkarimAbdelkarimMerchaDecoutere, StefaanStefaanDecoutereLorusso, GianGianLorusso2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/13829Impact of line width roughness on the matching performances of next-generation devicesJournal article